Gas Supply System 1 For Non-Flammable Protective or Reactive Gases in Static Tube Furnaces, not Gas-Tight
Gas supply system 1 is a basic version for static tube furnaces, for operation with non-flammable protective or reactive gases. This system is not completely gas-tight and can therefore not be used for vacuum operation.
Gas Supply Systems 15 and 2 for Non-Flammable Protective or Reactive Gases in Static Tube Furnaces, Gas-Tight
For increased atmospheric purity requirements in the working tube in static tube furnaces we recommend one of these gas-tight gas supply systems with stainless steel flanges on the end of the tube is recommended.
The less expensive gas supply system 15 for furnaces up to 1300 °C and working tubes to 120 mm diameter is available for R, RSH and RSV tube furnaces. It includes contact protection on the flange and a stainless steel type 1.4301 heat radiation protection insert for the tube ends to protect the seals. A heat radiation protection package cools the flanges and a water connection is thus not required. With this variant, the tube must not be opened while it is hot. It is also not suitable for applications with a turbomolecular pump to achieve high vacuum. Gas supply system 2 is the correct choice for this type of application.
Gas supply system 2 with water-cooled flanges is available for R, RHTC, RHTH, RHTV, RSH and RSV furnaces. Cooling water supply with NW9 hose connector to be provided by the customer.
Model | Gas supply system | ||||||
---|---|---|---|---|---|---|---|
1 | 15 | 2 | 25 | 26 | 3 | 4 | |
RD | ● | ||||||
R | ● | ● | ● | ● | ● | ||
RT | ● | ||||||
RHTC | ● | ● | ● | ● | |||
RHTH | ● | ● | ● | ||||
RHTV | ● | ● | ● | ||||
RSH | ● | ● | ● | ● | ● | ||
RSV | ● | ● | ● | ● | ● | ||
RSRB | ● | ● | ● | ||||
RSRC | ● | ● | ● |
Gas Supply Systems 25 and 26 for Non-Flammable Protective or Reactive Gases in Rotary Tube Furnaces, Gas-Tight
Gas supply systems for non-flammable protective and reactive gases are also available for RSRB and RSRC rotary tube furnaces.
Gas supply system 3 allows for the operation in a hydrogen atmosphere at temperatures above 750 °C. From 750 °C, hydrogen can be introduced into the working tube. At program end or when the temperature falls below 750 °C , the working tube is purged with nitrogen to prevent the formation of an explosive hydrogen/oxygen atmosphere. The purging volume is at least five times the volume of the tube. Surplus hydrogen is burnt off in an exhaust gas torch.
Model | Gas supply system | ||||||
---|---|---|---|---|---|---|---|
1 | 15 | 2 | 25 | 26 | 3 | 4 | |
RD | ● | ||||||
R | ● | ● | ● | ● | ● | ||
RT | ● | ||||||
RHTC | ● | ● | ● | ● | |||
RHTH | ● | ● | ● | ||||
RHTV | ● | ● | ● | ||||
RSH | ● | ● | ● | ● | ● | ||
RSV | ● | ● | ● | ● | ● | ||
RSRB | ● | ● | ● | ||||
RSRC | ● | ● | ● |
Gas Supply System 4 for Hydrogen Applications in Tube Furnaces from Room Temperature
Gas supply system 4 allows operation with a hydrogen atmosphere starting at ambient temperature. During hydrogen operation, a pressure of approx. 30 mbar is ensured in the working tube. At the gas outlet the hydrogen is burnt off in an exhaust gas torch. Equipped with a safety PLC control system, pre-purging, hydrogen inlet, operation, fault monitoring and purging at the end of the process are carried out automatically (with at least five times the volume of the tube). If a malfunction occurs, the tube is immediately purged with nitrogen and the system is automatically switched to a safe status.
Model | Gas supply system | ||||||
---|---|---|---|---|---|---|---|
1 | 15 | 2 | 25 | 26 | 3 | 4 | |
RD | ● | ||||||
R | ● | ● | ● | ● | ● | ||
RT | ● | ||||||
RHTC | ● | ● | ● | ● | |||
RHTH | ● | ● | ● | ||||
RHTV | ● | ● | ● | ||||
RSH | ● | ● | ● | ● | ● | ||
RSV | ● | ● | ● | ● | ● | ||
RSRB | ● | ● | ● | ||||
RSRC | ● | ● | ● |
The vacuum package enables the working tube to be evacuated for vacuum operation in tube furnaces. It consists of an intermediate component for the gas outlet, a ball valve, a pressure gauge and a manually operated vacuum pump that is connected to the gas outlet by a corrugated stainless steel hose. A gas-tight furnace system is required for the use of a vacuum package, e.g. with the gas-supply packages 15, 2, 25 or 26. To protect the vacuum pump, only cold stage evacuation is allowed. The pump can then remain switched during the running program. The maximum ultimate pressure in the working tube depends on the type of pump.
Model | Gas supply system | ||||||
---|---|---|---|---|---|---|---|
1 | 15 | 2 | 25 | 26 | 3 | 4 | |
RD | ● | ||||||
R | ● | ● | ● | ● | ● | ||
RT | ● | ||||||
RHTC | ● | ● | ● | ● | |||
RHTH | ● | ● | ● | ||||
RHTV | ● | ● | ● | ||||
RSH | ● | ● | ● | ● | ● | ||
RSV | ● | ● | ● | ● | ● | ||
RSRB | ● | ● | ● | ||||
RSRC | ● | ● | ● |
Furnace Chamber and Charge Controls
With the furnace chamber control, the temperature is only measured in the furnace chamber outside the working tube. This protects the thermocouples from damage and aggressive batch. The control is slow to avoid overshoots. Since the temperature inside the working tube is not measured in this mode, a significant temperature difference can occur between the batch temperature inside the tube and the furnace chamber temperature displayed in the controller. With an additional charge thermocouple, the “charge control” mode can measure the temperature in the furnace as well as the temperature inside the working tube. This enables the batch temperature to be controlled very precisely and quickly. Charge control can be used with all tube furnaces, with the exception of the RD and RT series.
Three-Zone Furnace Chamber Controls
The heated length is divided into three heating zones. The temperature is measured via one thermocouple per zone, which is positioned outside the working tube between the heating wires. The side zones are controlled via a setpoint offset in relation to the middle zone. In this way, the heat loss at the tube ends can be compensated in order to achieve an extended zone of constant temperature (+/− 5 K).
Freely Radiating Heating Elements
A very good temperature uniformity is achieved with the freely radiating heating elements on support tubes.